Electric Linear Slides EZSII Series for Clean Room Use

EZS6D070CM2-C

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EZSM6D070CM2C ESMC-C2

Actuator/Control Circuit

  This product is currently no longer available for sale.
Product Classification Product Name List Price Shipping Date
Actuator / Control Circuit EZS6D070CM2-C - Discontinued Product
(31.3.2019 discontinued)

Included

  • Actuator, Control Circuit, Hexagonal Socket Head Screw for Fixing the Linear Slide, Circuit Mounting Bracket, User I/O Connector, Sensor I/O Connector, Operating Manual

Specifications

Other Specifications

General Specifications (Motor)

Values are after rated operation at normal ambient temperature and humidity.

24 VDC

Item Specifications
Insulation Resistance

100 MΩ or more when 500 VDC megger is applied between the following places.

  • Between the motor case and excitation/sensor windings
  • Between the motor case and electromagnetic brake winding (electromagnetic brake types only)
Dielectric Strength

No abnormalities observed with application for 1 minute at the following points.

  • Between the motor case and excitation/sensor windings
    0.5 kVAC 50 Hz
  • Between the motor case and electromagnetic brake winding (electromagnetic brake types only)
    0.5 kVAC 50 Hz
Operating Ambient Temperature 0~+40 °C (Non-freezing)
Operating Ambient Humidity 85 % max. (Non-condensing)

Note

  • Do not measure insulation resistance or perform a dielectric strength test while the linear slide and controller are connected.

Single-phase 100-115 VAC, Single-phase 200-230 VAC

Item Specifications
Insulation Resistance

100 MΩ or more when 500 VDC megger is applied between the following places.

  • Between the motor case and excitation/sensor windings
  • Between the motor case and electromagnetic brake winding (electromagnetic brake types only)
Dielectric Strength

No abnormalities observed with application for 1 minute at the following points.

  • Between the motor case and excitation/sensor windings
    EZS3 and EZS4: 1.0 kVAC 50 Hz
    EZS6: 1.5 kVAC 50 Hz
  • Between the motor case and electromagnetic brake winding (electromagnetic brake types only)
    1.0 kVAC 50 Hz
Operating Ambient Temperature 0~+40 °C (Non-freezing)
Operating Ambient Humidity 85 % max. (Non-condensing)

Note

  • Do not measure insulation resistance or perform a dielectric strength test while the linear slide and controller are connected.

Circuit Specifications (Controller Mode)

Controller Mode

Item Controller Parts Name
ESMC-K2 ESMC-A2 ESMC-C2
Product Line Stored data type
Power Supply Input Control Power Supply 24 VDC±5 % 1.0 A [0.5 A only for controller (see +0.2 A with teaching pendant, +0.3 A with electromagnetic brake)].
Main Power Supply Voltage 24 VDC±10 % Single-phase 100-115 VAC −15~+10 % Single-phase 200-230 VAC −15~+10 %
Frequency - 50/60 Hz
Current 4.0 A*1 6.0 A*1 3.5 A*1
Positioning
Data		 Setting Mode Absolute mode (absolute-position specification), incremental mode (relative-position specification)
Setting Number 63 points
Setting Method Setting by accessory teaching pendant (EZT1) or data setting software (EZED2) (Stored in EEPROM)
Positioning*2
Control		 Method Sequential positioning, Data-select positioning
Traveling Amount Setting Range -83886.08~+83886.07 mm (in 0.01 mm units)
Starting Speed Setting Range 0.01~200.00 mm/s (in 0.01 mm/s units)
Operating Speed Setting Range 0.01~1500.00 mm/s (in 0.01 mm/s units)
Acceleration/Deceleration Rate Setting Range 0.01~20.00 m/s2 (in 0.01 m/s2 units)
Control Mode
  • External Input Mode (EXT): Mode for monitoring operation, command position, I/O status, and alarm status with external signals
  • Program Mode (PRG): Mode for creating, changing, and clearing operation data
  • Parameter Mode (PAR): Mode for setting and changing parameters for operation and function settings.
  • Test Mode (TST): Mode for manual operation, and I/O checks
Operation Mode Positioning operation, Return-to-home operation, Linked operation (maximum 4 links), Continuous operation
Input Signal/Input Mode START, STOP, HOME/PRESET, FREE, M0~M5, REQ, ACL/CK: 24 VDC Photocoupler input Input resistance 4.7 kΩ
FWD, RVS: 5 VDC Photocoupler input Input resistance 180 Ω or 24 VDC Photocoupler input Input resistance 2.7 kΩ
+LS, −LS, HOMELS: 24 VDC Photocoupler input Input resistance 4.7 kΩ
Output Signal/Output Mode ALM, END/OUTR, MOVE, AREA/OUT0, OUT1: Photocoupler and Open-collector output (24 VDC 10 mA max.)
ASG1, BSG1: Photocoupler and Open-collector output (24 VDC 15 mA max.)
ASG2, BSG2: Line driver output*3
Protective Function Excessive position deviation, overcurrent protection, overvoltage protection, overheat protection, overload, sensor error, overspeed, non-volatile memory error, etc.
Indicator (LED) PWR, ALM PWR, ALM, CHARGE
Cooling Method Natural Cooling Method
Mass 0.44 kg 0.77 kg
*1
The maximum current value varies depending on the linear slide and cylinder to be connected.
[ESMC-K2] ESRM3/ESRM4: 1.0 A ESRM5: 1.1 A EZSM3/EZSM4: 1.7 A EZSM6/SPVM6: 4.0 A EZAM4: 1.7 A EZAM6: 4.0 A
[ESMC-A2] EZSM3/EZSM4: 3.0 A EZSM6/SPVM6: 5.0 A SPVM8: 6.0 A EZAM4: 3.0 A EZAM6: 5.0 A PWAM6: 6.4 A PWAM8: 6.0 A
[ESMC-C2] EZSM3/EZSM4: 2.1 A EZSM6/SPVM6: 3.0 A SPVM8: 3.5 A EZAM4: 2.1 A EZAM6: 3.0 A PWAM6: 3.9 A PWAM8: 3.5 A
*2
Since it varies depending on the linear slide and cylinder to be connected, check the specifications of each series.
*3
The pulse output has a time lag of up to maximum 1 ms with respect to the movement of the linear slide or cylinder. Use to check the linear slide and cylinder stop positions.

Circuit Specifications (Driver Mode)

Driver Mode

Item Controller Parts Name
ESMC-K2 ESMC-A2 ESMC-C2
Power Supply Input Control Power Supply 24 VDC±5 % 1.0 A [0.5 A for Controller only (see +0.2 A with teaching pendant, +0.3 A with electromagnetic brake)].
Main Power Supply Voltage 24 VDC±10 % Single-phase 100-115 VAC −15~+10 % Single-phase 200-230 VAC −15~+10 %
Frequency − 50/60 Hz
Current 4.0 A*1 6.0 A*1 3.5 A*1
Maximum Response Frequency 1-Pulse Input Mode, 2-Pulse Input Mode: 80 kHz, Phase Difference Input Mode: 20 kHz
Operation Mode Return-to-home operation,
Pulse input operation (1-pulse input mode, 2-pulse input mode, phase difference input mode)
Input Signal/Input Mode ACL/CK, FREE, C.OFF, HOME/PRESET, REQ, HMSTOP: 24 VDC Photocoupler input Input resistance 4.7 kΩ FP, RP: 5 VDC Photocoupler input Input resistance 180 Ω or 24 VDC Photocoupler input Input resistance 2.7 kΩ
+LS, −LS, HOMELS: 24 VDC Photocoupler input Input resistance 4.7 kΩ
Output Signal/Output Mode MOVE, END/OUTR, ALM, TIM/OUT0, OUT1: Photocoupler, open-collector output (24 VDC, 10 mA max.) ASG1, BSG1: Photocoupler, open-collector output (24 VDC, 15 mA max.) ASG2, BSG2: Line driver output*2
Protective Function Excessive position deviation, overcurrent protection, overvoltage protection, overheat protection, overload, sensor error, overspeed, non-volatile memory error, etc.
Indicator (LED) PWR, ALM PWR, ALM, CHARGE
Cooling Method Natural Cooling Method
Mass 0.44 kg 0.77 kg
*1
The maximum current value varies depending on the linear slide and cylinder to be connected.
[ESMC-K2] ESRM3/ESRM4: 1.0 A ESRM5: 1.1 A EZSM3/EZSM4: 1.7 A EZSM6/SPVM6: 4.0 A EZAM4: 1.7 A EZAM6: 4.0 A
[ESMC-A2] EZSM3/EZSM4: 3.0 A EZSM6/SPVM6: 5.0 A SPVM8: 6.0 A EZAM4: 3.0 A EZAM6: 5.0 A PWAM6: 6.4 A PWAM8: 6.0 A
[ESMC-C2] EZSM3/EZSM4: 2.1 A EZSM6/SPVM6: 3.0 A SPVM8: 3.5 A EZAM4: 2.1 A EZAM6: 3.0 A PWAM6: 3.9 A PWAM8: 3.5 A
*2
The pulse output has a time lag of up to maximum 1 ms with respect to the movement of the linear slide or cylinder. Use to check the linear slide and cylinder stop positions.

Circuit General Specifications

Values are after rated operation at normal ambient temperature and humidity.

24 VDC

Item Specifications
Insulation Resistance

100 MΩ or more when 500 VDC megger is applied between the following places.

  • Between FG and main power supply input terminal
  • Between FG and I/O connector
Dielectric Strength

No abnormalities observed with application for 1 minute at the following points:

  • Between FG and main power supply input terminal
    0.5 kVAC 50 Hz
  • Between FG and I/O connector
    0.5 kVAC 50 Hz
Operating Ambient Temperature 0~+40 °C (Non-freezing)
Operating Ambient Humidity 85 % max. (Non-condensing)

Note

  • Do not measure insulation resistance or perform a dielectric strength test while the linear slide and controller are connected.

Single-Phase 100/115 VAC/Single-Phase 200/230 VAC

Item Specifications
Insulation Resistance

100 MΩ or more when 500 VDC megger is applied between the following places.

  • Between I/O connector, main power supply input terminal, motor cable connector and battery connector
  • Between control power supply terminal and main power supply input terminal, motor connector, battery connector
  • Between protective earth terminal and main power supply input terminal, motor connector, battery connector
Dielectric Strength

No abnormalities observed with application for 1 minute at the following points:

  • Between signal I/O terminal, control power supply input terminal and main power supply input terminal
    1.8 kVAC 50 Hz
  • Between signal I/O terminal, control power supply input terminal and motor output terminal
    1.8 kVAC 50 Hz
  • Between signal I/O terminal and control power supply input terminal and battery input terminal
    1.8 kVAC 50 Hz
  • Between protective earth terminal and main power supply input terminal
    1.5 kVAC 50 Hz
  • Between protective earth terminal and motor output terminal
    1.5 kVAC 50 Hz
  • Between protective earth terminal and battery input terminal
    1.5 kVAC 50 Hz
Operating Ambient Temperature 0~+40 °C (Non-freezing)
Operating Ambient Humidity 85 % max. (Non-condensing)

Calculating Load Moment

When a load is transported with an electric linear slide or electric cylinder (a unit equipped with shaft guide covers only), the load moment acts on the linear guide/shaft guide if the position of the load's center of gravity is offset from the center of the table/center of the shaft guide. The direction of action applies to the directions for pitching (MP), yawing (MY), and rolling (MR), depending on the position of the offset.

Load Moment of Electric Linear Slide Load Moment of Electric Cylinder (Units equipped with shaft guide only)

Even though the selected electric actuators satisfy the load mass and positioning time requirements, when the center of gravity of the load is overhung from the table's center/shaft guide’s center, the run life may decrease as a result of the load moment. Load moment calculations must be completed and whether the conditions are within specifications values must be checked. The moment applied under static conditions is the static permissible moment. The moment applied under movement is the dynamic permissible moment, and both must be checked.

Calculate the load moment of the electric linear slides and electric cylinders (units equipped with shaft guide covers only) based on loads that are applied. Check that the static permissible moment and dynamic permissible moment are within limits and check that strength is sufficient.

G: Position of the Load's Center of Gravity
  • *For more information on calculating static permissible moment and dynamic permissible moments, click here.

Load Moment Formula

\(\begin{align}\frac{|\Delta \mathrm{M_P}|}{\mathrm{M_P}}+\frac{|\Delta \mathrm{M_Y}|}{\mathrm{M_Y}}+ \frac{|\Delta \mathrm{M_R}|}{\mathrm{M_R}}\leqq 1 \end{align}\)

When there are several overhung loads, etc., it is determined by the sum of moments from all loads.

For Multiple Loads (n)

\(\begin{align}\frac{|\Delta \mathrm{M_{P1}} + \Delta \mathrm{M_{P2}} + \cdots \Delta \mathrm{M_{Pn}}|}{\mathrm{M_P}} + \frac{|\Delta \mathrm{M_{Y1}} + \Delta \mathrm{M_{Y2}} + \cdots \Delta \mathrm{M_{Yn}}|}{\mathrm{M_Y}} + \frac{|\Delta \mathrm{M_{R1}} + \Delta \mathrm{M_{R2}} + \cdots \Delta \mathrm{M_{Rn}}|}{\mathrm{M_R}} \leqq 1 \end{align}\)

System Configuration

System Configuration

Cables and Accessories

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